Пассивация
Ultra-high vacuum cleavage coating system
The vacuum cleavage coating system can realize ultra-high vacuum in-situ cleavage (Cleaving), passivation (Passivation) and optical coating (Optical Coating) of high-power laser bars. In-situ cleavage of laser diode bars in an ultra-high vacuum environment can obtain defect-free and pollution-free single crystal cleavage surfaces. The cleaved bars are transferred to the coating chamber through a circular transfer chamber (Cluster Tool) for passivation film or optical film evaporation. The entire process is carried out in an ultra-high vacuum environment better than 2*E-10 torr to achieve high-quality device production.
Ultra-high vacuum cleavage coating system
The vacuum cleavage coating system can realize ultra-high vacuum in-situ cleavage (Cleaving), passivation (Passivation) and optical coating (Optical Coating) of high-power laser bars. In-situ cleavage of laser diode bars in an ultra-high vacuum environment can obtain defect-free and pollution-free single crystal cleavage surfaces. The cleaved bars are transferred to the coating chamber through a circular transfer chamber (Cluster Tool) for passivation film or optical film evaporation. The entire process is carried out in an ultra-high vacuum environment better than 2*E-10 torr to achieve high-quality device production.